ACS Automated Characterization Suite ソフトウェア

All Series 2600 SourceMeter®

SMU Instruments

One Powerful Software Solution—

A Wide Range of Hardware

Configurations

Keithley’s Automated Characterization Suite (ACS) is a flexible, interactive software test environment designed for device characterization, parametric test, reliability test, and even simple functional tests. ACS supports a wide array of Keithley instrumentation and systems, hardware configurations, and test settings, from a few benchtop instruments for use in a QA lab to fully integrated and automated rack-based parametric testers.

ACS offers exceptional testing and analysis flexibility, plus its intuitive GUI helps novice users be productive almost immediately, regardless of their level of programming experience. The GUI simplifies configuring test instrumentation, making I‑V measurements, getting results, and analyzing them quickly because no coding is required. Even if you’re an infrequent user, you can go from creating a new test setup to characterizing new devices in a fraction of the time required by older test development approaches. Just as important, ACS provides all the tools you need to set up tests, analyze data, and export your results—without ever leaving the ACS environment.

Key Features

•Supports the following test modules: GUI, Lua Script, Python and C

•Supports a wide array of instruments and probers to accommodate a broad range of applications

•Intuitive GUI simplifies I-V tests, analysis, and results from benchtop to fully automated parametric testers to enhance user experience

•Develop and execute tests at the device, sub-site, site, wafer, and cassette level for increased test capability

•Intuitive GUI for test plan development and interactive operation

•Interactive and real-time data plotting accelerates review of test results

•Highly portable test projects with minimal or no modifications

•Supports multiple source measure units (SMU) for parallel testing to increase productivity

•Flexible, modular software accommodates evolving and mature test requirements

•Customizable for parameters extraction by special algorithms for added flexibility

•Customized data reporting and uploading (FTP, DB, etc.)

•Windows 10 compatible

Automate Your Data

Gathering Processes

The wafer prober automation option for ACS makes it easy to interface a variety of popular semi- or fully-automatic wafer probe stations into your test setup to capture large amounts of data quickly. This option includes a wafer description utility (for creating a virtual wafer to use in creating wafer-level sampling plans), real-time wafer maps with binning capabilities (for designating a device’s disposition before it’s packaged, in die sorting, etc.), a cassette sample plan utility (for designating which wafers are to be tested), and a post-test cassette and wafer review utility (for exploring and comparing test results from multiple wafers interactively).

Many of the tools and capabilities built into ACS enhance automated device characterization:

•Wafer- and cassette-level automation

•Limits file generation tool

•Test results binning, including interactive binning plot

•Test map to map device and tests to sites and subsites

•Interactive probe station control mode

•Real-time plotting

•Single or per-wafer Keithley data file

•SQLite™ database and binning file output options

•Lot summary report generator

•Integrated support for Keithley Series 2600 and Series 2650A High Power System SourceMeter® SMU instruments

•Integrated scripting editor and GUI builder

•Integrated support for C (with Series 4200 Parameter Analyzer only), Python, and Lua (for Series 2600 ) programming languages

ACS Automated Characterization Suite Software

Share Test Projects and Results

ACS offers a common set of key elements that work across a wide range of hardware configurations, which saves time and increases productivity. Systems perform consistently from one hardware implementation to another, so, for example, it’s easy to transfer your knowledge of an ACS-based system used in single-device component characterization to another designed for wafer level testing.

Similarly, test projects and sequences you create for one Keithley ACS hardware configuration will run on compatible setups in other test settings with little or no modification. This portability across a range of configurations­ reduces the effort involved in transferring a new device from one lab or department to another and simplifies comparing results obtained in various test settings. This is possible because ACS employs common open-standard file interfaces for projects, wafer maps, output files, etc., as well as common test libraries and instrument drivers, so you can be confident of high results correlation whether your tests are run on a system with a single Series 2600 SMU instrument or a fully automated custom die sort tool with dozens of these instruments.

Maximize the Productivity of Your Keithley Hardware

The tools in ACS simplify test development and maximize the speed of each Keithley instrument linked into the system. For example, ACS builds on the throughput advantages inherent in Keithley’s Series 2600B System SourceMeter SMU instruments. These advantages include:

•On-board TSP technology in each instrument allows each 2600 to operate independently of the ACS system’s controller

•TSP-Link® Technology high speed communications bus networks multiple Series 2600 SMU instruments together

•True parallel test execution

•Precision timing

Together, ACS and Keithley TSP-based hardware offer the highest throughput in the industry to lower the cost of test without requiring you to spend time learning new programming concepts or languages before getting the data needed to accomplish your goals.

ACS Automated Characterization Suite Software

Add More Hardware to Adapt to Changing Needs

High scalability and a flexible architecture simplify configuring an ACS system to match your specific testing requirements or to upgrade an existing system to handle new test needs as they evolve. Our wide range of source-measure and switching capabilities provides a solid foundation for configuring customized applications, because ACS software with PyVisa can control virtually any instrument or peripheral with a standard hardware interface. For example, Tektronix oscilloscopes and third- party LCR meters can be easily integrated into any ACS system and drivers are available for popular instruments. Also, ACS’s integrated scripting environment can control any GPIB instrument the application may require, such as a hot chuck controller.

Many ACS systems are configured using one or more Series 2600 SMU instruments, which are optimized for precision sourcing and measurement synchronization to capture high speed events. These systems offer unmatched testing speed and accuracy because they provide a SMU-per-pin architecture. ACS system configurations can support any number from 2 to more than 40 SMU instruments in a single rack for true parallel characterization applications.

ACS also makes it easy to integrate other instruments into your system to meet specialized test requirements, such as:

•High channel count switching— Keithley 707B Six-slot Switch Mainframe

•Combination of switching and measurement— Keithley Series 3700A Switch/Multimeters

•Higher resolution, lower current, or other capabilities such as C-V or pulse testing—Keithley 4200A Parameter Analyzer

•40 V/50 A range (80 V/100 A when connecting two units) of Keithley 2651A or 3 kV/120 mA range of 2657A High Power System SourceMeter SMU instruments

Related Products

For applications requiring wafer level testing, use ACS Integrated Test Systems or ACS Wafer Level Reliability Systems. These systems supply a wafer map, prober automation capabilities, and analysis options for yield monitoring, as well as related statistical calculations for maximizing productivity in wafer level test environments.

ACS V5.4 Pre-installation Software Requirements

Minimum Configuration for a Computer

Recommended Configuration for a Computer

Ordering Information