Model 6517B Electrometer High-Resistance Meter Specifications

Document number SPEC-6517BC

Specifications are subject to change without notice.

VOLTS

Range	6½-digit resolution	Accuracy (1 year)¹ 18 °C to 28 °C ± (% reading + offset)	Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C
2 V	1 µV	0.025 + 40 µV	0.003 + 20 µV
20 V	10 µV	0.025 + 300 µV	0.002 + 100 µV
200 V	100 µV	0.06 + 3 mV	0.002 + 1 mV

¹ When properly zeroed, 6½-digit, 1 PLC (power line cycle), median filter on, digital filter = 10 readings.

NMRR: 2 V and 20 V range > 60 dB, 200 V range > 55 dB. 50 Hz or 60 Hz²

CMRR: > 120 dB at DC, 50 Hz or 60 Hz

Input Impedance: > 200 TΩ in parallel with 20 pF, < 2 pF guarded (1 MΩ with zero check on)

Small signal bandwidth at preamplifier output: Typically 100 kHz (–3 dB)

² Line sync on.

AMPS

Range	6½-digit resolution	Accuracy (1 year)¹ 18 °C to 28 °C ± (% reading + offset)	Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C
20 pA	10 aA³	1 + 3 fA	0.1 + 500 aA
200 pA	100 aA³	1 + 5 fA	0.1 + 1 fA
2 nA	1 fA	0.2 + 300 fA	0.1 + 20 fA
20 nA	10 fA	0.2 + 500 fA	0.03 + 100 fA
200 nA	100 fA	0.2 + 5 pA	0.03 + 1 pA
2 µA	1 pA	0.1 + 100 pA	0.005 + 20 pA
20 µA	10 pA	0.1 + 500 pA	0.005 + 100 pA
200 µA	100 pA	0.1 + 5 nA	0.005 + 1 nA
2 mA	1 nA	0.1 + 100 nA	0.008 + 20 nA
20 mA	10 nA	0.1 + 500 nA	0.008 + 100 nA

³ aA = 10^–18 A, fA = 10^–15 A.

Input bias current: < 3 fA at T_CAL; temperature coefficient = 0.5 fA/°C, 20 pA range

Input bias current noise: < 750 aA peak-peak (capped input), 0.1 Hz to 10 Hz bandwidth, damping on; digital filter = 40 readings, 20 pA range

Input voltage burden at T_CAL ± 1 °C: < 20 µV on 20 pA, 2 nA, 20 nA, 2 µA, 20 µA ranges; < 100 µV on 200 pA, 200 nA, 200 µA ranges; < 2 mV on 2 mA range; < 5 mV on 20 mA range

Temperature coefficient of input voltage burden: < 10 µV/°C on pA, nA, µA ranges

Preamplifier settling time (to 10% of final value) typical: 0.5 s (damping off), 2.0 s (damping on) on pA ranges; 15 ms on nA ranges damping off, 1 ms on µA ranges damping off; 500 µs on mA ranges damping off

NMRR: >60 dB on all ranges at 50 Hz or 60 Hz⁴

COULOMBS

Range	6½-digit resolution	Accuracy (1 year)^{5, 6} 18 °C to 28 °C ± (% reading + offset)	Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C
2 nC	1 fC	0.4 + 50 fC	0.04 + 30 fC
20 nC	10 fC	0.4 + 500 fC	0.04 + 100 fC
200 nC	100 fC	0.4 + 5 pC	0.04 + 1 pC
2 µC	1 pC	0.4 + 50 pC	0.04 + 10 pC

⁴ Line sync on.
⁵ Specifications apply immediately after charge acquisition. Add:

where T_A = period of time in seconds between the coulombs zero and measurement, Q_AV = average charge measured over T_A, and RC = 300,000 typical.

⁶ When properly zeroed, 6½-digit, 1 PLC (power line cycle), median filter on, digital filter = 10 readings.

Input bias current: < 4 fA at T_CAL; Temperature coefficient = 0.5 fA/°C, 2 nC range

OHMS

Range	6½-digit resolution	Accuracy (1 year)⁷ (10% to 100% range) 18 °C to 28 °C (1 year) ± (% reading + offset)	Temperature coefficient (10% to 100% range) 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C	Auto V source	Amps range
2 MΩ	1 Ω	0.125 + 10 Ω	0.01 + 10 Ω	40 V	200 µA
20 MΩ	10 Ω	0.125 + 100 Ω	0.01 + 100 Ω	40 V	20 µA
200 MΩ	100 Ω	0.15 + 1 kΩ	0.015 + 1 kΩ	40 V	2 µA
2 GΩ	1 kΩ	0.225 + 10 kΩ	0.035 + 10 kΩ	40 V	200 nA
20 GΩ	10 kΩ	0.225 + 100 kΩ	0.035 + 100 kΩ	40 V	20 nA
200 GΩ	100 kΩ	0.35 + 1 MΩ	0.110 + 1 MΩ	40 V	2 nA
2 TΩ	1 MΩ	0.35 + 10 MΩ	0.110 + 10 MΩ	400 V	2 nA
20 TΩ	10 MΩ	1.025 + 100 MΩ	0.105 + 100 MΩ	400 V	200 pA
200 TΩ	100 MΩ	1.15 + 1 GΩ	0.125 + 1 GΩ	400 V	20 pA

⁷ Specifications are for auto V-source ohms, when properly zeroed, 6½-digit, 1 PLC, median filter on, digital filter = 10 readings. If user-selectable voltage is required, use manual mode. Manual mode displays resistance (up to 10¹⁸ Ω) calculated from measured current. Accuracy is equal to the accuracy of the V-source plus the accuracy of the selected current range.

Preamplifier settling time: Add voltage source settling time to preamplifier settling time in current specification. Ranges over 20 GΩ require additional settling based on the characteristics of the load.

OHMS (alternating polarity method)

The alternating polarity sequence compensates for the background (offset) currents of the material or device under test. Maximum tolerable offset up to full scale of the current range used.

Using Keithley Model 8002A or 8009 fixture

Repeatability: ΔI_BG × R/V_ALT + 0.1 % (1σ) (instrument temperature constant ± 1 °C).

Accuracy: (V_SRCErr + I_MEASErr x R)/V_ALT
ΔI_BG is a measured, typical background current noise from the sample and fixture.
V_ALT is the alternating polarity voltage used.
V_SRCErr is the accuracy (in volts) of the voltage source using V_ALT as the setting.
I_MEASErr is the accuracy (in amperes) of the ammeter using V_ALT/R as the reading.

VOLTAGE SOURCE

Range	5½-digit resolution	Accuracy (1 year) 18 °C to 28 °C ± (% reading + offset)	Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C
100 V	5 mV	0.15 +10 mV	0.005 + 1 mV
1000 V	50 mV	0.15 +100 mV	0.005 + 10 mV

Maximum output current:
100 V range: ± 10 mA, hardware short circuit protection at < 14.0 mA
1000 V range: ± 1 mA, hardware short circuit protection at < 1.4 mA

Settling time:
100 V range: < 8 ms to rated accuracy
1000 V range: < 50 ms to rated accuracy

Noise (typical): 10 Hz to 20 Mhz
100 V range: < 4.7 mV_RMS
1000 V range: < 5.1 mV_RMS

TEMPERATURE (THERMOCOUPLE)

Thermocouple type	Range	Accuracy (1 year)⁸ 18 °C to 28 °C, ± (% reading + °C)
K	−25 °C to 150 °C	± (0.3 + 1.5 °C)

⁸ Excluding probe errors, T_CAL ± 5 °C, 1 PLC integration time.

HUMIDITY

Range	Accuracy (1 year)⁹ 18 °C to 28 °C, ± (% reading + % relative humidity)
0% to 100%	± (0.3 + 0.5 °C)

⁹ Humidity probe accuracy must be added. This is ± 3 % relative humidity, for Model 6517-RH, up to 65 °C probe environment, not to exceed 85 °C.

IEEE-488 BUS IMPLEMENTATION

Implementation: SCPI (IEEE-488.2, SCPI-1999.0)
Trigger to reading done: 150 ms typical, with external trigger
RS-232 implementation: Supports: SCPI 1991.0; baud rates: 300, 600, 1200, 2400, 4800, 9600, 19.2 k, 38.4 k, 57.6 k, and 115.2 k
Flow control: None, Xon/Xoff
Connector: DB-9 TXD/RXD/GND

GENERAL

Display: 6½-digit vacuum fluorescent multiline
Overrange indication: Display reads "OVERFLOW”; for readings > 105 % of range, the display reads "OUT OF LIMIT" for excessive overrange conditions
Ranging: Automatic or manual
Conversion time: Selectable 0.01 PLC to 10 PLC
Programs: Provide front-panel access to IEEE address, choice of engineering units or scientific notation
Maximum input: 250 V_PEAK, DC to 60 Hz sine wave; 10 s per minute maximum on mA ranges (one-sixth duty cycle)
Maximum common mode voltage (DC to 60 Hz sine wave): Electrometer, 500 V_PEAK; V-source, 750 V_PEAK
Isolation (meter COMMON to chassis): > 10¹⁰ Ω, < 500 pF
Input connector: Three-lug triaxial on rear panel
2 V analog output: 2 V for full range input; noninverting in volts mode, inverting when measuring amperes, ohms, or coulombs; output impedance 10 kΩ nominal
Preamplifier output: Provides a guard output for voltage measurements; can be used as an inverting output or with external feedback in Amps and Coulombs modes
External trigger: TTL-compatible external trigger and electrometer complete
Guard: Switchable voltage guard available
Digital I/O and trigger line: Available, see manual for usage
EMC: Conforms to European Union Directive 89/336/EEC, EN 61326-1
Safety: Conforms to European Union Directive 73/23/EEC, EN 61010-1
Test sequences: Device-characterization (diode, capacitor, cable, resistor), resistivity, surface-insulation resistance, sweep
Reading storage: 50,000

READING RATE:

To internal buffer	425	readings/second¹¹
To IEEE-488 bus	400	readings/second^{10, 11}
Bus transfer	3300	readings/second¹¹

¹⁰ 0.01 PLC, digital filters off, front panel off, temperature + relative humidity off, line sync off.
¹¹ Binary transfer mode.

Digital filter: Median and averaging
Environment: Operating: 0 °C to 50 °C; relative humidity 70% noncondensing, up to 35 °C; storage: –25 °C to +65 °C; for indoor use only
Altitude: Maximum 2000 m (6562 ft) above sea level per EN61010-1
Warm-up: 1 hour to rated accuracy (see manual for recommended procedure)
Power: User selectable 100 V ac, 120 V ac, 220 V ac, 240 V ac, 50 Hz/60 Hz, 100 VA maximum

PHYSICAL

Case dimensions: 90 mm × 214 mm × 369 mm (3½ in. × 8½ in. × 14½ in.)
Working dimensions: From front of case to rear, including power cord and IEEE-488 connector: 394 mm (15.5 in.)
Net weight: 5.4 kg (11.8 lbs)
Shipping weight: 6.9 kg (15.1 lbs)

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SPEC-6517B March 2020

Model 6517B Electrometer High-Resistance Meter Specifications

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